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3rd International Workshop on Piezoelectric MEMS

With the success of the previous two workshops and rapidly growing interest in piezoelectric thin film MEMS devices, the 3rd International Workshop on Piezoelectric MEMS in Washington, DC (April 9-10, 2013) brought together researchers and engineers from industry, academia, and government research facilities to discuss the state-of-the-art in the field. Emphasis was placed on challenges for the research and device community, and the stimulating exchange of ideas and experiences.