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2nd International Workshop on Piezoelectric MEMS

After the success of the first workshop in 2010 at Aachen. In 2011 we brought together again researchers and engineers from industry and academia to report and discuss on progress in in the field, and stimulate exchange on experience and possible cooperation. A combination of presentations and discussions gave experts and researchers the chance to boost this promising and quickly developing market. In addition, the workshop was a great opportunity for companies working in MEMS or using MEMS to learn about the state of the art in piezoMEMS based on ferroelectric and non-ferroelectric piezoelectric thin films.

The following topics were addressed by invited oral presentations from experts in the field:
  • Piezoelectric thin film synthesis & properties
  • Integration
  • Testing and instrumentation
  • Applications
  • Cooperative European projects
We thank all participants for the lively and stimulating discussions and in particular the individual presenters for their contributions.
Paul Muralt
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